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This water repellent layer prevents the aqueous developer from penetrating between the photoresist layer and the wafer's surface, thus preventing so-called lifting of small photoresist structures in the (developing) pattern.
Excellent developability: Research and development carried on at the Lastra Group laboratories resulted in the formulation of an environmentally safe diazo/photopolymer coating which is processed in a biodegradable, aqueous developer.
VOC Emissions of Materials Used Camera Plate Department Materials used VOC Emissions tonnes Developer 5.820 Powder fixer 0 Aqueous Developer 2.888 TOTAL 8.708 Back to top Emission source 2:
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